Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399428 | Method and apparatus for forming a patterned layer of material | Evgenia KURGANOVA, Alexey Olegovich POLYAKOV, Jim Vincent Overkamp, Teis Johan Coenen, Tamara Druzhinina +2 more | 2025-08-26 |
| 11984236 | Radiation system | Han-Kwang Nienhuys, Rilpho Ludovicus Donker | 2024-05-14 |
| 11720034 | Lithographic apparatus and cooling method | Nicolaas Ten Kate | 2023-08-08 |
| 11112618 | Beam splitting apparatus | Han-Kwang Nienhuys | 2021-09-07 |
| 10747127 | Lithographic apparatus | Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more | 2020-08-18 |
| 10580545 | Beam delivery apparatus and method | Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more | 2020-03-03 |
| 10580546 | Radiation system | Han-Kwang Nienhuys, Rilpho Ludovicus Donker | 2020-03-03 |
| 10495976 | Attenuation apparatus and method | Han-Kwang Nienhuys | 2019-12-03 |
| 10216101 | Reflector | Han-Kwang Nienhuys, Sjoerd Nicolaas Lambertus Donders, Michael Jozef Mathijs Renkens, Erik Roelof Loopstra | 2019-02-26 |
| 10103508 | Electron injector and free electron laser | Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more | 2018-10-16 |
| 9823572 | Lithographic method | Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager +8 more | 2017-11-21 |
| 9785051 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Edwin Johan Buis, Erik Maria Rekkers, Hako Botma +2 more | 2017-10-10 |
| 9728931 | Electron injector and free electron laser | Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more | 2017-08-08 |
| 9494878 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Edwin Johan Buis, Sven Antoin Johan Hol, Erik Maria Rekkers | 2016-11-15 |
| 9372413 | Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Franciscus Johannes Joseph Janssen, Nicolaas Aldegonda Jan Maria Van Aerle | 2016-06-21 |
| 9170500 | Lithographic apparatus and device manufacturing method with corrective positioning of reflective element | Jan Bernard Plechelmus Van Schoot, Koen Van Ingen Schenau | 2015-10-27 |
| 9134629 | Illumination system, lithographic apparatus and method of forming an illumination mode | Erik Roelof Loopstra, Koen Van Ingen Schenau, Jan Bernard Plechelmus Van Schoot, Christian Wagner | 2015-09-15 |
| 9052605 | Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameter | Koen Van Ingen Schenau, Jan Bernard Plechelmus Van Schoot | 2015-06-09 |
| 8867021 | Illumination system, lithographic apparatus and method of adjusting an illumination mode | Edwin Johan Buis, Marinus Johannes Maria Van Dam, Jan Bernard Plechelmus Van Schoot, Fidelus Adrianus Boon, Hermanus Johannes Maria Kreuwel | 2014-10-21 |
| 8817232 | Optical apparatus, and method of orienting a reflective element | Edwin Johan Buis, Fidelus Adrianus Boon | 2014-08-26 |
| 8757823 | Mountings for rotation of array of reflective elements and lithographic apparatus incorporating same | Edwin Johan Buis | 2014-06-24 |
| 8724081 | Lithographic apparatus and method | Edwin Johan Buis | 2014-05-13 |
| 8634062 | Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing method | Edwin Johan Buis, Uwe Mickan | 2014-01-21 |
| 6641447 | Method of manufacturing a display device | — | 2003-11-04 |
| 6437841 | Display device comprising a scanning window | Dirk Jan Broer, Hendrik De Koning, Mark Thomas Johnson | 2002-08-20 |