Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174550 | Calibration system for an extreme ultraviolet light source | Daniel Jason Riggs, Liane Manuela Matthes, Martinus Hendrikus Antonius Leenders | 2024-12-24 |
| 11984236 | Radiation system | Han-Kwang Nienhuys, Gosse Charles De Vries | 2024-05-14 |
| 11140765 | Radiation source | Han-Kwang Nienhuys | 2021-10-05 |
| 10580545 | Beam delivery apparatus and method | Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more | 2020-03-03 |
| 10580546 | Radiation system | Han-Kwang Nienhuys, Gosse Charles De Vries | 2020-03-03 |
| 9823572 | Lithographic method | Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Gosse Charles De Vries, Erik Roelof Loopstra, Vadim Yevgenyevich Banine +8 more | 2017-11-21 |