| 12332570 |
Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris |
Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more |
2025-06-17 |
| 11170907 |
Radioisotope production |
Pieter Willem Herman De Jager, Sipke Jacob Bijlsma, Andrey Nikipelov, Nicolaas Ten Kate, Antonius Theodorus Anna Maria Derksen +3 more |
2021-11-09 |
| 10580545 |
Beam delivery apparatus and method |
Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more |
2020-03-03 |
| 10437154 |
Lithographic method |
Andrey Nikipelov, Erik Roelof Loopstra, Wouter Joep ENGELEN, Johannes Antonius Gerardus Akkermans |
2019-10-08 |
| 10103508 |
Electron injector and free electron laser |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Gosse Charles De Vries, Leonardus Adrianus Gerardus Grimminck +7 more |
2018-10-16 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Erik Roelof Loopstra, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen, Nicolaas Ten Kate +6 more |
2018-05-29 |
| 9823572 |
Lithographic method |
Andrey Nikipelov, Gosse Charles De Vries, Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager +8 more |
2017-11-21 |
| 9728931 |
Electron injector and free electron laser |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Gosse Charles De Vries, Leonardus Adrianus Gerardus Grimminck +7 more |
2017-08-08 |
| 9632419 |
Radiation source |
Jan Bernard Plechelmus Van Schoot, Vadim Yevgenyevich Banine, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors, Uwe Stamm +3 more |
2017-04-25 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen +5 more |
2016-08-09 |
| 9377695 |
Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine |
2016-06-28 |
| 8766212 |
Correction of spatial instability of an EUV source by laser beam steering |
— |
2014-07-01 |
| 8736806 |
Lithographic apparatus, a radiation system, a device manufacturing method and a radiation generating method |
Johannes Christiaan Leonardus Franken, Kurt Gielissen |
2014-05-27 |
| 8610089 |
Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method |
Sjoerd Nicolaas Lambertus Donders, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Martinus Cornelis Maria Verhagen, Gerrit Van Donk +1 more |
2013-12-17 |
| 7863591 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken +1 more |
2011-01-04 |
| 7724349 |
Device arranged to measure a quantity relating to radiation and lithographic apparatus |
Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Niels Machiel Driessen, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken +1 more |
2010-05-25 |
| 7541603 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken +1 more |
2009-06-02 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine, Vladimir Vital'evitch Ivanov, Erik René Kieft, Erik Roelof Loopstra +5 more |
2009-05-05 |
| 7470916 |
Lithographic apparatus, device manufacturing method and radiation collector |
Wilhelmus Josephus Box, Harm-Jan Voorma, Maurice Pierre Marie Arthur Limpens |
2008-12-30 |
| 7113261 |
Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby |
Marcel Mathijs Theodore Marie Dierichs, Markus Franciscus Antonius Eurlings |
2006-09-26 |
