Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863591 | Radiation system and lithographic apparatus comprising the same | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken +1 more | 2011-01-04 |
| 7724349 | Device arranged to measure a quantity relating to radiation and lithographic apparatus | Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more | 2010-05-25 |
| 7541603 | Radiation system and lithographic apparatus comprising the same | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken +1 more | 2009-06-02 |
| 7397538 | Radiation system and lithographic apparatus | Wilhelmus Josephus Box, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen, Hendrikus Gijsbertus Schimmel | 2008-07-08 |