Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072620 | Method of manufacturing a membrane assembly | Pieter-Jan Van Zwol, Sander Baltussen, Dennis De Graaf, Adrianus Johannes Maria Giesbers, Alexander Ludwig KLEIN +11 more | 2024-08-27 |
| 10394141 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2019-08-27 |
| 9753383 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2017-09-05 |
| 9753372 | Radiation source for an EUV optical lithographic apparatus, and lithographic apparatus comprising such a radiation source | — | 2017-09-05 |
| 8976332 | Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system | Martinus Wilhelmus Van Den Heuvel, Josephus Cornelius Johannes Antonius Vugts | 2015-03-10 |
| 8736806 | Lithographic apparatus, a radiation system, a device manufacturing method and a radiation generating method | Olav Waldemar Vladimir Frijns, Kurt Gielissen | 2014-05-27 |
| 7897941 | Lithographic apparatus, device manufacturing method, and use of a radiation collector | Alexander Matthijs Struycken, Leon Joseph Maria Van Den Schoor | 2011-03-01 |
| 7889312 | Apparatus comprising a rotating contaminant trap | Vadim Yevgenyevich Banine, Arnoud Cornelis Wassink | 2011-02-15 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Arnoud Cornelis Wassink +1 more | 2011-01-11 |
| 7863591 | Radiation system and lithographic apparatus comprising the same | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Olav Waldemar Vladimir Frijns +1 more | 2011-01-04 |
| 7843548 | Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system | Martinus Wilhelmus Van Den Heuvel, Josephus Cornelis Johannes Antonlus Vugts | 2010-11-30 |
| 7724349 | Device arranged to measure a quantity relating to radiation and lithographic apparatus | Wouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Niels Machiel Driessen, Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns +1 more | 2010-05-25 |
| 7541603 | Radiation system and lithographic apparatus comprising the same | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Wouter Anthon Soer, Olav Waldemar Vladimir Frijns +1 more | 2009-06-02 |
| 7501642 | Radiation source | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Alexander Matthijs Struycken | 2009-03-10 |
| 7462841 | Lithographic apparatus, device manufacturing method, and use of a radiation collector | Alexander Matthijs Struycken, Leon Joseph Maria Van Den Schoor | 2008-12-09 |
| 7098994 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Hubertus Josephina Moors, Uwe Mickan, Harm-Jan Voorma | 2006-08-29 |