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Lithographic apparatus involving an immersion liquid supply system with an aperture |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Sjoerd Nicolaas Lambertus Donders +1 more |
2016-03-15 |
| 8937704 |
Lithographic apparatus and device manufacturing method involving a resistivity sensor |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Sjoerd Nicolaas Lambertus Donders +1 more |
2015-01-20 |
| 8142852 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Sjoerd Nicolaas Lambertus Donders +1 more |
2012-03-27 |
| 7897941 |
Lithographic apparatus, device manufacturing method, and use of a radiation collector |
Johannes Christiaan Leonardus Franken, Alexander Matthijs Struycken |
2011-03-01 |
| 7779781 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Sjoerd Nicolaas Lambertus Donders +1 more |
2010-08-24 |
| 7542127 |
Lithographic apparatus and method for manufacturing a device |
Timotheus Franciscus Sengers, Nicolaas Antonius Allegondus Johannes Van Asten, Wilhelmus Josephus Box, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier +6 more |
2009-06-02 |
| 7462841 |
Lithographic apparatus, device manufacturing method, and use of a radiation collector |
Johannes Christiaan Leonardus Franken, Alexander Matthijs Struycken |
2008-12-09 |