Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766558 | Lithographic apparatus with flexible transportation line having varying stiffness between two objects | Martijn Houkes, Norbert Erwin Therenzo Jansen | 2017-09-19 |
| 9455172 | Electrostatic clamp | — | 2016-09-27 |
| 9363879 | Module and method for producing extreme ultraviolet radiation | Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more | 2016-06-07 |
| 9176398 | Method and system for thermally conditioning an optical element | Roger W. Schmitz, Marcel Johannus Elisabeth Hubertus Muitjens, Lun Kai Cheng, Franciscus Johannes Joseph Janssen, Willem Arie Van Helden +9 more | 2015-11-03 |
| 8901521 | Module and method for producing extreme ultraviolet radiation | Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more | 2014-12-02 |
| 8749756 | Lithographic apparatus and device manufacturing method | Yuri Johannes Gabriël Van De Vijver, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski | 2014-06-10 |
| 8711325 | Method and system for determining a suppression factor of a suppression system and a lithographic apparatus | Hendrikus Gijsbertus Schimmel, Hans Johannes Maria Freriks, Yuri Johannes Gabriël Van De Vijver, Gerardus Hubertus Petrus Maria Swinkels, Marc Antonius Maria Haast +3 more | 2014-04-29 |
| 8451429 | Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor | — | 2013-05-28 |
| 8441610 | Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods | Ronald Van Der Ham, Herman Vogel, Niek Jacobus Johannes Roset | 2013-05-14 |
| 8242471 | Radiation source and lithographic apparatus including a contamination trap | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Maarten Marinus Johannes Wilhelmus Van Herpen | 2012-08-14 |
| 8228487 | Lithographic apparatus and device manufacturing method | Albert Pieter Rijpma | 2012-07-24 |
| 8218128 | Lithographic apparatus and device manufacturing method incorporating a pressure shield | — | 2012-07-10 |
| 8115900 | Lithographic apparatus and device manufacturing method | Yuri Johannes Gabriël Van De Vijver, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski | 2012-02-14 |
| 8094287 | Lithographic appararus and method | Erik Roelof Loopstra, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernhard Gellrich, Bauke Jansen +1 more | 2012-01-10 |
| 8072575 | Lithographic apparatus with temperature sensor and device manufacturing method | Paulus Bartholomeus Johannes Schaareman | 2011-12-06 |
| 7978339 | Lithographic apparatus temperature compensation | Marcel Hendrikus Maria Beems, Emiel Jozef Melanie Eussen | 2011-07-12 |
| 7924399 | Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods | Ronald Van Der Ham, Herman Vogel, Niek Jacobus Johannes Roset | 2011-04-12 |
| 7728951 | Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus | Ronald Van Der Ham, Niek Jacobus Johannes Roset | 2010-06-01 |
| RE41307 | Mask for clamping apparatus, e.g. for a lithographic apparatus | Sjoerd Nicolaas Lambertus Donders | 2010-05-04 |
| 7700930 | Lithographic apparatus with rotation filter device | Edwin Johan Buis | 2010-04-20 |
| 7629593 | Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method | Edwin Johan Buis, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer | 2009-12-08 |
| 7542127 | Lithographic apparatus and method for manufacturing a device | Timotheus Franciscus Sengers, Nicolaas Antonius Allegondus Johannes Van Asten, Wilhelmus Josephus Box, Leon Martin Levasier, Erik Roelof Loopstra +6 more | 2009-06-02 |
| 7528935 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Koen Jacobus Johannes Maria Zaal, Hendricus Johannes Maria Meijer, Joost Jeroen Ottens, Marco Le Kluse, Jan Hopman | 2009-05-05 |
| 7492441 | Lithographic apparatus and device manufacturing method incorporating a pressure shield | — | 2009-02-17 |
| 7446849 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernard Gellrich, Bauke Jansen +1 more | 2008-11-04 |