| 11378893 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2022-07-05 |
| 11163240 |
Heating system for an optical component of a lithographic apparatus |
Marcus Adrianus Van De Kerkhof |
2021-11-02 |
| 10935895 |
Lithographic apparatus |
Adrianus Hendrik Koevoets, Erik Johan Arlemark, Sander Catharina Reinier Derks, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk +5 more |
2021-03-02 |
| 10877384 |
Radiation shielding device and apparatus comprising such shielding device |
Philippe Habets, Günes NAKIBOGLU, Roger W. Schmitz, Remco VAN DE MEERENDONK, Joris Dominicus Bastiaan Johannes Van den Boom +1 more |
2020-12-29 |
| 10838310 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2020-11-17 |
| 10712675 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Anthonie Kuijper |
2020-07-14 |
| 10580545 |
Beam delivery apparatus and method |
Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more |
2020-03-03 |
| 10416574 |
Lithographic apparatus |
Adrianus Hendrik Koevoets, Sander Catharina Reinier Derks, Jim Vincent Overkamp, Jacobus Cornelis Gerardus Van Der Sanden |
2019-09-17 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2019-04-23 |
| 10268128 |
Lithographic apparatus |
Johannes Paul Marie De La Rosette, Edwin Cornelis Kadijk, Nicolas Lallemant, Jan Liefooghe, Markus Matthes +4 more |
2019-04-23 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2019-04-09 |
| 10088755 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas |
2018-10-02 |
| 9823590 |
Lithographic apparatus and device manufacturing method |
Manish Ranjan, Carlo Cornelis Maria Luijten, Maksym Chernyshov |
2017-11-21 |
| 9772565 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Anthonie Kuijper |
2017-09-26 |
| 9715179 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas |
2017-07-25 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2017-05-09 |
| 9625835 |
Lithographic apparatus and device manufacturing method |
Manish Ranjan, Carlo Cornelis Maria Luijten, Maksym Chernyshov |
2017-04-18 |
| 9454088 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Anthonie Kuijper |
2016-09-27 |
| 9372413 |
Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices |
Gosse Charles De Vries, Jan Bernard Plechelmus Van Schoot, Nicolaas Aldegonda Jan Maria Van Aerle |
2016-06-21 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders +6 more |
2016-02-23 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 9182678 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas |
2015-11-10 |
| 9176398 |
Method and system for thermally conditioning an optical element |
Roger W. Schmitz, Tjarko Adriaan Rudolf Van Empel, Marcel Johannus Elisabeth Hubertus Muitjens, Lun Kai Cheng, Willem Arie Van Helden +9 more |
2015-11-03 |
| 9164401 |
Projection system and lithographic apparatus |
Erik Roelof Loopstra, Wilhelmus Petrus De Boeij, Hans Butler, Robertus Johannes Marinus De Jongh, Jan Bernard Plechelmus Van Schoot +2 more |
2015-10-20 |