Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332570 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more | 2025-06-17 |
| 12180607 | Electrochemical deposition system including optical probes | Andrew James Pfau, Shantinath Ghongadi, Zhian He | 2024-12-31 |
| 12158706 | Lithographic apparatus and method with improved contaminant particle capture | Marcus Adrianus Van De Kerkhof | 2024-12-03 |
| 12105039 | Systems and methods for in-situ measurement of sheet resistance on substrates | Andrew James Pfau, Douglas Hill, Douglas Koeller, Burton Williams, Shantinath Ghongadi | 2024-10-01 |
| 11906907 | Apparatus and method for determining a condition associated with a pellicle | Derk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Richard David Jacobs, Andrew Judge +5 more | 2024-02-20 |
| 11621187 | Systems and methods for controlling substrate approach toward a target horizontal plane | Douglas Hill, Cian Sweeney | 2023-04-04 |
| 11208732 | Monitoring surface oxide on seed layers during electroplating | Ludan Huang, Lee J. Brogan, Tighe A. Spurlin, Shantinath Ghongadi, Jonathan D. Reid +2 more | 2021-12-28 |
| 10968531 | Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath | Shantinath Ghongadi, Frederick Dean Wilmot, Douglas Hill, Bryan L. Buckalew | 2021-04-06 |
| 10593586 | Systems and methods for controlling substrate approach toward a target horizontal plane | Douglas Hill, Cian Sweeney | 2020-03-17 |
| 10497592 | Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing | Cian Sweeney, Shantinath Ghongadi | 2019-12-03 |
| 10443146 | Monitoring surface oxide on seed layers during electroplating | Ludan Huang, Lee J. Brogan, Tighe A. Spurlin, Shantinath Ghongadi, Jonathan D. Reid +2 more | 2019-10-15 |
| 9823590 | Lithographic apparatus and device manufacturing method | Carlo Cornelis Maria Luijten, Franciscus Johannes Joseph Janssen, Maksym Chernyshov | 2017-11-21 |
| 9735035 | Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing | Cian Sweeney, Shantinath Ghongadi | 2017-08-15 |
| 9625835 | Lithographic apparatus and device manufacturing method | Carlo Cornelis Maria Luijten, Franciscus Johannes Joseph Janssen, Maksym Chernyshov | 2017-04-18 |
| 9587322 | Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath | Shantinath Ghongadi, Frederick Dean Wilmot, Douglas Hill, Bryan L. Buckalew | 2017-03-07 |
| 9028666 | Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath | Shantinath Ghongadi, Frederick Dean Wilmot, Douglas Hill, Bryan L. Buckalew | 2015-05-12 |
| 8797504 | Lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver +9 more | 2014-08-05 |
| 8730448 | Lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot +11 more | 2014-05-20 |
| 8299446 | Sub-field enhanced global alignment | Andrew M. Hawryluk, Emily True, Warren W. Flack, Detlef Fuchs | 2012-10-30 |
| 8301396 | Miniature ultrafine particle sensor | Suresh Dhanijala | 2012-10-30 |