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Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris |
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Apparatus for and method of in-situ particle removal in a lithography apparatus |
Ronald Peter Albright, Peter Kochersperger, Victor Antonio PEREZ-FALCON |
2022-05-17 |
| 11137694 |
Particle suppression systems and methods |
Yang-Shan Huang, Marcel Joseph Louis Boonen, Han-Kwang Nienhuys, Jacob Brinkert, Peter Kochersperger |
2021-10-05 |
| 11009803 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
2021-05-18 |
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Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process |
Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Kornelis Tijmen Hoekerd +5 more |
2020-04-07 |
| 10558129 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
2020-02-11 |
| 10429741 |
Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma, Arnout Johannes Meester +6 more |
2019-10-01 |
| 10345712 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2019-07-09 |
| 10241418 |
Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus |
Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Kornelis Tijmen Hoekerd +5 more |
2019-03-26 |
| 10222701 |
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method |
Chuangxin Zhao, Sander Baltussen, Pär Mårten Lukas Broman, Cristian Bogdan Craus, Jan Groenewold +4 more |
2019-03-05 |
| 10151984 |
Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma, Arnout Johannes Meester +6 more |
2018-12-11 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2018-04-24 |
| 9740113 |
Lithographic apparatus, device manufacturing method and method of clamping an object |
Paul Janssen, Petrus Jacobus Maria VAN GILS |
2017-08-22 |
| 9316924 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus De Kruif, Johannes Wilhelmus Maria Cornelis Teeuwsen, Erik Petrus Buurman |
2016-04-19 |
| 9298110 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device |
Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof, Adrianus Johannes Maria Van Dijk +2 more |
2016-03-29 |
| 9195148 |
Side seal for wet lens elements |
Matthew Lipson, Taras Shvets |
2015-11-24 |
| 9176371 |
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma, Arnout Johannes Meester +6 more |
2015-11-03 |
| 9164403 |
Radiation source, lithographic apparatus and device manufacturing method |
Antonius Theodorus Wilhelmus Kempen, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Wilbert Jan Mestrom |
2015-10-20 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 8780321 |
Lithographic apparatus and device manufacturing method |
Thijs Egidius Johannes Knaapen, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Martijn Hendrik Kamphuis, Paulus Martinus Maria Liebregts +10 more |
2014-07-15 |
| 8730447 |
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Hans Jansen, Siebe Landheer, Arnout Johannes Meester, Bauke Jansen +3 more |
2014-05-20 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2014-01-21 |
| 8564757 |
Lithographic apparatus and a method of operating the apparatus |
Bauke Jansen, Hans Jansen, Antonius Johannus Van Der Net, Pieter Jacob Kramer, Anthonie Kuijper +2 more |
2013-10-22 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2013-10-01 |