Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298110 | Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device | Vadim Yevgenyevich Banine, Richard Joseph Bruls, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof, Adrianus Johannes Maria Van Dijk +2 more | 2016-03-29 |
| 8487279 | Gas contamination sensor, lithographic apparatus, method of determining a level of contaminant gas and device manufacturing method | — | 2013-07-16 |