Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298110 | Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device | Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Erik Roelof Loopstra, Adrianus Johannes Maria Van Dijk +2 more | 2016-03-29 |
| 8476167 | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus | Hubert Adriaan Van Mierlo, Erik Ham, Hendricus Johannes Maria Meijer, Joost Jeroen Ottens, Johannes Adrianus Petrus Leijtens +3 more | 2013-07-02 |
| 8013981 | Lithographic apparatus and device manufacturing method | Cornelis Maria Zwaans, Ernst Eduart Vrolijks | 2011-09-06 |
| 7375353 | Lithographic apparatus and device manufacturing method | Hako Botma, Marius Ravensbergen | 2008-05-20 |
| 7361911 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Robertus Nicodemus Jacobus Van Ballegoij, Vadim Yevgenyevich Banine, Gert-Jan Heerens, Frederik T. E. Heuts +2 more | 2008-04-22 |
| 7245357 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Jan Van Elp, Johannes Hubertus Josephina Moors, Joost Jeroen Ottens, Adrianus Mathijs Maria De Groof +3 more | 2007-07-17 |
| 7187433 | Electrostatic clamp assembly for a lithographic apparatus | Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal, Marco Le Kluse | 2007-03-06 |
| 7119346 | Lithographic apparatus and device manufacturing method | Gert-Jan Heerens | 2006-10-10 |
| 7110090 | Lithographic apparatus and method to detect correct clamping of an object | — | 2006-09-19 |
| 7041989 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Joost Jeroen Ottens, Marco Le Kluse | 2006-05-09 |