Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8537330 | Lithographic apparatus, device manufacturing method and computer readable medium | Erik Roelof Loopstra, Franciscus Johannes Joseph Janssen | 2013-09-17 |
| 8089672 | Array element device control method and apparatus | Patricius Aloysius Jacobus Tinnemans, Heine Melle Mulder, Wilfred Edward Endendijk, Jozef Ferdinand Dymphna Verbeeck | 2012-01-03 |
| 8052289 | Mirror array for lithography | Heine Melle Mulder | 2011-11-08 |
| 7999914 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra | 2011-08-16 |
| 7800079 | Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Yurii Victorvitch Sidelnikov +1 more | 2010-09-21 |
| 7525640 | Lithographic apparatus and device manufacturing method | Bastiaan Stephanus Hendricus Jansen, Erik Roelof Loopstra, Markus Hauf | 2009-04-28 |
| 7436484 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra | 2008-10-14 |
| 7423721 | Lithographic apparatus | Antonius Johannes Josephus Van Dijsseldonk, Mustafa Amhaouch, Wilhelmus Josephus Box, Johannes Henricus Wilhelmus Jacobs, Hernes Jacobs +3 more | 2008-09-09 |
| 7375353 | Lithographic apparatus and device manufacturing method | Hendrik Antony Johannes Neerhof, Hako Botma | 2008-05-20 |
| 6819400 | Lithographic apparatus and device manufacturing method | — | 2004-11-16 |