| 10001709 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels +2 more |
2018-06-19 |
| 9958787 |
Lithographic method and apparatus |
Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Timotheus Franciscus Sengers, Christiaan Louis Valentin |
2018-05-01 |
| 9835950 |
Radiation source |
Markus Franciscus Antonius Eurlings, Niek Antonius Jacobus Maria Kleemans, Ramon Mark Hofstra, Oscar Franciscus Jozephus Noordman, Tien Nang Pham +3 more |
2017-12-05 |
| 9594306 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +2 more |
2017-03-14 |
| 9523921 |
EUV radiation system and lithographic apparatus |
Erik Roelof Loopstra |
2016-12-20 |
| 9341960 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker |
2016-05-17 |
| 9097982 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels |
2015-08-04 |
| 8908144 |
Lithographic apparatus and device manufacturing method |
Rogier Herman Mathijs Groeneveld, Dominicus Jacobus Petrus Adrianus Franken, Bastiaan Stephanus Hendricus Jansen, Robertus Johannes Marinus De Jongh, Marc Wilhelmus Maria Van Der Wijst +1 more |
2014-12-09 |
| 8830444 |
Lithographic apparatus and method |
Jan Bernard Plechelmus Van Schoot, Igor Petrus Maria Bouchoms, Markus Franciscus Antonius Eurlings |
2014-09-09 |
| 8570489 |
Lithographic projection apparatus and method of compensating perturbation factors |
Jan Bernard Plechelmus Van Schoot, Hans Van Der Laan, Diederik Jan Maas |
2013-10-29 |
| 7817246 |
Optical apparatus |
Uwe Mickan |
2010-10-19 |
| 7463336 |
Device manufacturing method and apparatus with applied electric field |
Uwe Mickan |
2008-12-09 |
| 7423721 |
Lithographic apparatus |
Mustafa Amhaouch, Wilhelmus Josephus Box, Johannes Henricus Wilhelmus Jacobs, Hernes Jacobs, Marius Ravensbergen +3 more |
2008-09-09 |
| 7312860 |
Test pattern, inspection method, and device manufacturing method |
Arie Jeffrey Den Boef, Hans Van Der Laan, Mircea Dusa, Antoine Gaston Marie Kiers |
2007-12-25 |
| 7307262 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Robertus Johannes Marinus De Jongh, Jacob Kleijn, Bastiaan Stephanus Hendricus Jansen, Marc Wilhelmus Maria Van Der Wijst |
2007-12-11 |
| 7253880 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Petrus Rutgerus Bartray, Paulus Martinus Maria Liebregts |
2007-08-07 |
| 7151594 |
Test pattern, inspection method, and device manufacturing method |
Arie Jeffrey Den Boef, Hans Van Der Laan, Mircea Dusa, Antoine Gaston Marie Kiers |
2006-12-19 |
| 7148952 |
Lithographic apparatus and device manufacturing method |
Markus Franciscus Antonius Eurlings, Johannes Jacobus Matheus Baselmans, Hako Botma, Jan Bruining, Marcel Mathijs Theodore Marie Dierichs +1 more |
2006-12-12 |
| 7145640 |
Lithographic apparatus, device manufacturing method and variable attenuator |
Harm-Jan Voorma, Uwe Mickan |
2006-12-05 |
| 7136149 |
Lithographic apparatus with autofocus system |
Uwe Mickan |
2006-11-14 |
| 7116399 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Josephus Jacobus Smits +1 more |
2006-10-03 |
| 7023524 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Harm-Jan Voorma |
2006-04-04 |
| 6987275 |
Lithographic apparatus and device manufacturing method |
Levinus Pieter Bakker, Jeroen Jonkers, Marcel Mathijs Theodore Marie Dierichs |
2006-01-17 |
| 6967756 |
Lithographic apparatus device manufacturing method and device manufactured thereby |
Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken |
2005-11-22 |
| 6940587 |
Lithographic apparatus and a measurement system |
Hans Van Der Laan, Johannes Jacobus Matheus Baselmans, Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors |
2005-09-06 |