Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156791 | Lithographic apparatus and method | — | 2018-12-18 |
| 9268236 | Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder | Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more | 2016-02-23 |
| 8830444 | Lithographic apparatus and method | Jan Bernard Plechelmus Van Schoot, Antonius Johannes Josephus Van Dijsseldonk, Markus Franciscus Antonius Eurlings | 2014-09-09 |
| 7751027 | Lithographic apparatus and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more | 2010-07-06 |
| 6855486 | Lithographic method and apparatus | Jozef Marie Finders, Johannes Jacobus Matheus Baselmans, Donis Flagello | 2005-02-15 |