Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346029 | Curved reticle by mechanical and phase bending along orthogonal axes | Daniel Gene Smith, Michael Binnard, Stephen P. Renwick | 2025-07-01 |
| 11300884 | Illumination system with curved 1d-patterned mask for use in EUV-exposure tool | Daniel Gene Smith, David M. Williamson, Michael Binnard | 2022-04-12 |
| 11099483 | Euv lithography system for dense line patterning | David M. Williamson, Stephen P. Renwick, Daniel Gene Smith, Michael Binnard | 2021-08-24 |
| 10890849 | EUV lithography system for dense line patterning | David M. Williamson, Stephen P. Renwick, Daniel Gene Smith, Michael Binnard | 2021-01-12 |
| 10310387 | Dynamic patterning method that removes phase conflicts and improves pattern fidelity and CDU on a two phase-pixelated digital scanner | Shane R. Palmer, Julia A. Sakamoto | 2019-06-04 |
| 10133184 | Using customized lens pupil optimization to enhance lithographic imaging in a source-mask optimization scheme | — | 2018-11-20 |
| 9366952 | Lithographic substrate and a device | — | 2016-06-14 |
| 9091941 | Fast illumination simulator based on a calibrated flexible point-spread function | Daniel Gene Smith | 2015-07-28 |
| 9086633 | Lithographic method | — | 2015-07-21 |
| 8910093 | Fast photoresist model | — | 2014-12-09 |
| 8588508 | Method or matching high-numerical aperture scanners | Shane R. Palmer | 2013-11-19 |
| 8395757 | Optimized polarization illumination | Robert John Socha, Steve Hansen | 2013-03-12 |
| 8252487 | Device manufacturing method and mask for use therein | Marcel Mathijs Theodore Marie Dierichs, Markus Franciscus Antonius Eurlings | 2012-08-28 |
| 7952803 | Lithographic apparatus and device manufacturing method | — | 2011-05-31 |
| 7710544 | Optimized polarization illumination | Robert John Socha, Steve Hansen | 2010-05-04 |
| 7684013 | Lithographic apparatus and device manufacturing method | Steven George Hansen, Wolfgang Singer, Bernd Geh, Vladan Blahnik | 2010-03-23 |
| 7548302 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Robert John Socha, James Greeneich, Kars Zeger Troost | 2009-06-16 |
| 7538875 | Lithographic apparatus and methods for use thereof | Remco Marcel Van Dijk, Michel Fransois Hubert Klaassen, Tammo Uitterdijk | 2009-05-26 |
| 7511884 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Kevin Cummings, Alexander Straaijer | 2009-03-31 |
| 7317506 | Variable illumination source | Robert John Socha, James Greeneich | 2008-01-08 |
| 7292315 | Optimized polarization illumination | Robert John Socha, Steve Hansen | 2007-11-06 |
| 7256873 | Enhanced lithographic resolution through double exposure | Jozef Maria Finders, Steven George Hansen | 2007-08-14 |
| 7221501 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Kevin Cummings, Alexander Straaijer | 2007-05-22 |
| 7206059 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Kevin Cummings, Alexander Straaijer, Marcel Mathijs Theodore Marie Dierichs | 2007-04-17 |
| 7113259 | Lithographic apparatus and device manufacturing method | John Doering | 2006-09-26 |