Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651934 | Systems and methods of creating multiple electron beams | Xinrong Jiang, Sameet K. Shriyan, Luca Grella, Christopher Sears | 2023-05-16 |
| 11047346 | Fuel additive system for a diesel fuel engine | — | 2021-06-29 |
| 9934933 | Extractor electrode for electron source | Laurence S. Hordon, Nikolai Chubun, Luca Grella, Xinrong Jiang, Daniel Bui +2 more | 2018-04-03 |
| 7511884 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello, Alexander Straaijer | 2009-03-31 |
| 7345738 | Certified cells and method of using certified cells for fabricating a device | — | 2008-03-18 |
| 7221501 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello, Alexander Straaijer | 2007-05-22 |
| 7206059 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello, Alexander Straaijer, Marcel Mathijs Theodore Marie Dierichs | 2007-04-17 |
| 7022437 | Perfluoropolyether liquid pellicle and methods of cleaning masks using perfluoropolyether liquid | — | 2006-04-04 |
| 7022436 | Embedded etch stop for phase shift masks and planar phase shift masks to reduce topography induced and wave guide effects | — | 2006-04-04 |
| 6943941 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello | 2005-09-13 |
| 6444398 | Method for manufacturing a semiconductor wafer using a mask that has several regions with different scattering ability | — | 2002-09-03 |
| 6297169 | Method for forming a semiconductor device using a mask having a self-assembled monolayer | Pawitter Mangat, C. Joseph Mogab, Allison M. Fisher | 2001-10-02 |
| 6140020 | Method for manufacturing a semiconductor wafer using a mask that has several regions with different scattering ability | — | 2000-10-31 |
| 6007948 | Method of fabricating X-ray masks with reduced errors | — | 1999-12-28 |
| 5663018 | Pattern writing method during X-ray mask fabrication | William A. Johnson, Daniel L. Laird | 1997-09-02 |
| 5590239 | Planar uniform heating surface with additional circumscribing ring | Douglas J. Resnick, William A. Johnson, Hector T. H. Chen | 1996-12-31 |
| 5283746 | Manufacturing adjustment during article fabrication | Robert C. Frye, Edward Alios Rietman | 1994-02-01 |