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Cold-field-emitter electron gun with self-cleaning extractor using reversed e-beam current |
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Systems and methods of creating multiple electron beams |
Xinrong Jiang, Sameet K. Shriyan, Kevin Cummings, Christopher Sears |
2023-05-16 |
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High resolution electron beam apparatus with dual-aperture schemes |
Xinrong Jiang, Christopher Sears, Nikolai Chubun |
2022-11-22 |
| 11302510 |
Space charge insensitive electron gun designs |
Christopher Sears |
2022-04-12 |
| 11087950 |
Charge control device for a system with multiple electron beams |
Christopher Sears |
2021-08-10 |
| 10460903 |
Method and system for charge control for imaging floating metal structures on non-conducting substrates |
Arjun Hegde, Christopher Sears |
2019-10-29 |
| 9934933 |
Extractor electrode for electron source |
Laurence S. Hordon, Nikolai Chubun, Xinrong Jiang, Daniel Bui, Kevin Cummings +2 more |
2018-04-03 |
| 8089051 |
Electron reflector with multiple reflective modes |
Regina Freed, Mark A. McCord |
2012-01-03 |
| 7958464 |
Electron beam patterning |
Allen M. Carroll |
2011-06-07 |
| 7755061 |
Dynamic pattern generator with cup-shaped structure |
Leonid Baranov, Yehiel Gotkis |
2010-07-13 |
| 7361941 |
Calibration standards and methods |
Gian Francesco Lorusso, Christopher F. Bevis, David L. Adler, Ian Smith |
2008-04-22 |
| 7276690 |
Method and system for e-beam scanning |
Gian Francesco Lorusso, Douglas K. Masnaghetti, Amir Azordegan |
2007-10-02 |
| 7098456 |
Method and apparatus for accurate e-beam metrology |
Gian Francesco Lorusso, Paola De Cecco, David L. Adler, David Goodstein, Chris Bevis |
2006-08-29 |
| 7019292 |
E-beam detection of defective contacts/vias with flooding and energy filter |
Frank Fan, David L. Adler, Kirk J. Bertsche |
2006-03-28 |
| 7009177 |
Apparatus and method for tilted particle-beam illumination |
Marian Mankos, David L. Adler |
2006-03-07 |
| 6979824 |
Filtered e-beam inspection and review |
David L. Adler |
2005-12-27 |
| 6815675 |
Method and system for e-beam scanning |
Gian Francesco Lorusso, Douglas K. Masnaghetti, Amir Azordegan |
2004-11-09 |
| 6797955 |
Filtered e-beam inspection and review |
David L. Adler, Gabor Toth |
2004-09-28 |
| 6670612 |
Undercut measurement using SEM |
Gian Francesco Lorusso |
2003-12-30 |