Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10769761 | Generating high resolution images from low resolution images for semiconductor applications | Saurabh Sharma, Amitoz Singh Dandiana, Mohan Mahadevan, Chao Fang, Brian Duffy | 2020-09-08 |
| 10545412 | Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control | Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton +1 more | 2020-01-28 |
| 10276346 | Particle beam inspector with independently-controllable beams | Brian Duffy, Christopher Sears | 2019-04-30 |
| 9513565 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Craig MacNaughton, Sathish Veeraraghavan, Pradeep Vukkadala, Jaydeep Sinha | 2016-12-06 |
| 9373165 | Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance | Pradeep Vukkadala, Craig MacNaughton, Jaydeep Sinha | 2016-06-21 |
| 9087176 | Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control | Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton +2 more | 2015-07-21 |
| 9029810 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Craig MacNaughton, Sathish Veeraraghavan, Pradeep Vukkadala, Jaydeep Sinha | 2015-05-12 |
| 7423269 | Automated feature analysis with off-axis tilting | Hedong Yang, Gongyuan Qu, Gian Francesco Lorusso | 2008-09-09 |
| 7405402 | Method and apparatus for aberration-insensitive electron beam imaging | Srinivas Vedula, Laurence S. Hordon, Alan D. Brodie, Gian Francesco Lorusso, Takuji Tada | 2008-07-29 |
| 7276690 | Method and system for e-beam scanning | Gian Francesco Lorusso, Luca Grella, Douglas K. Masnaghetti | 2007-10-02 |
| 7173243 | Non-feature-dependent focusing | Hedong Yang | 2007-02-06 |
| 7015468 | Methods of stabilizing measurement of ArF resist in CD-SEM | Gian Francesco Lorusso, Ananthanarayanan Mohan, Mark A. Neil, Waiman Ng, Srini Vedula | 2006-03-21 |
| 6995369 | Scanning electron beam apparatus and methods of processing data from same | Matthew Lent, Hedong Yang | 2006-02-07 |
| 6815675 | Method and system for e-beam scanning | Gian Francesco Lorusso, Luca Grella, Douglas K. Masnaghetti | 2004-11-09 |
| 6770879 | Motion picture output from electron microscope | Christopher F. Bevis, Bharat Marathe, David R. Bakker | 2004-08-03 |