Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278086 | Pattern height metrology using an e-beam system | Mohamed Saib, Alain Moussa, Anne-Laure Charley, Danilo De Simone, Joren Severi | 2025-04-15 |
| 9104122 | Methods and systems for evaluating extreme ultraviolet mask flatness | Sang Sun Lee | 2015-08-11 |
| 9086638 | Detection of contamination in EUV systems | Rik Jonckheere, Anne-Marie Goethals, Ivan Pollentier | 2015-07-21 |
| 8006202 | Systems and methods for UV lithography | In-Sung Kim, Byeong-Soo Kim, Anne-Marie Goethals, Rik Jonckheere, Jan Hermans | 2011-08-23 |
| 7750319 | Method and system for measuring contamination of a lithographical element | Rik Jonckheere, Anne-Marie Goethals, Jan Hermans | 2010-07-06 |
| 7423269 | Automated feature analysis with off-axis tilting | Amir Azordegan, Hedong Yang, Gongyuan Qu | 2008-09-09 |
| 7405402 | Method and apparatus for aberration-insensitive electron beam imaging | Srinivas Vedula, Amir Azordegan, Laurence S. Hordon, Alan D. Brodie, Takuji Tada | 2008-07-29 |
| 7361941 | Calibration standards and methods | Christopher F. Bevis, Luca Grella, David L. Adler, Ian Smith | 2008-04-22 |
| 7276690 | Method and system for e-beam scanning | Luca Grella, Douglas K. Masnaghetti, Amir Azordegan | 2007-10-02 |
| 7098456 | Method and apparatus for accurate e-beam metrology | Paola De Cecco, Luca Grella, David L. Adler, David Goodstein, Chris Bevis | 2006-08-29 |
| 7041976 | Automated focusing of electron image | Mark A. Neil, Gabor Toth, Varoujan Chakarian, Douglas K. Masnaghetti | 2006-05-09 |
| 7015468 | Methods of stabilizing measurement of ArF resist in CD-SEM | Amir Azordegan, Ananthanarayanan Mohan, Mark A. Neil, Waiman Ng, Srini Vedula | 2006-03-21 |
| 6930308 | SEM profile and surface reconstruction using multiple data sets | Robert Anthony Watts, Alexander Jozef Gubbens, Laurence S. Hordon | 2005-08-16 |
| 6815675 | Method and system for e-beam scanning | Luca Grella, Douglas K. Masnaghetti, Amir Azordegan | 2004-11-09 |
| 6784425 | Energy filter multiplexing | Laurence S. Hordon, Sander Josef Gubbens, Douglas K. Masnaghetti | 2004-08-31 |
| 6670612 | Undercut measurement using SEM | Luca Grella | 2003-12-30 |