Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278086 | Pattern height metrology using an e-beam system | Gian Francesco Lorusso, Alain Moussa, Anne-Laure Charley, Danilo De Simone, Joren Severi | 2025-04-15 |
| 10578978 | Method for determining the dose corrections to be applied to an IC manufacturing process by a matching procedure | Patrick J. Schiavone, Thiago Figueiro, Sébastien Bayle | 2020-03-03 |
| 10522328 | Method of performing dose modulation, in particular for electron beam lithography | Patrick J. Schiavone, Thiago Figueiro | 2019-12-31 |
| 10423074 | Method for calculating the metrics of an IC manufacturing process | Aurélien Fay, Patrick J. Schiavone, Thiago Figueiro | 2019-09-24 |
| 10295912 | Method for determining the parameters of an IC manufacturing process model | Patrick J. Schiavone, Thiago Figueiro | 2019-05-21 |
| 10156796 | Method for determining the parameters of an IC manufacturing process by a differential procedure | Patrick J. Schiavone, Thiago Figueiro | 2018-12-18 |