Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11599019 | Method for forming an extreme ultraviolet lithography pellicle | Marina Timmermans, Cedric Huyghebaert, Elie Schapmans, Emily Gallagher | 2023-03-07 |
| 11181818 | Lithography scanner | Emily Gallagher, Joern-Holger Franke, Marina Timmermans, Marina Mariano Juste | 2021-11-23 |
| 11163229 | Induced stress for EUV pellicle tensioning | Marina Mariano Juste, Marina Timmermans, Cedric Huyghebaert, Emily Gallagher | 2021-11-02 |
| 11092886 | Method for forming a pellicle | Marina Timmermans, Emily Gallagher, Hanns Christoph Adelmann, Cedric Huyghebaert, Jae Uk Lee | 2021-08-17 |
| 10712659 | Method for forming a carbon nanotube pellicle membrane | Emily Gallagher, Cedric Huyghebaert, Hanns Christoph Adelmann, Marina Timmermans, Jae Uk Lee | 2020-07-14 |
| 9086638 | Detection of contamination in EUV systems | Rik Jonckheere, Anne-Marie Goethals, Gian Francesco Lorusso | 2015-07-21 |
| 7528387 | Methods and systems for characterising and optimising immersion lithographic processing | — | 2009-05-05 |