Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9086638 | Detection of contamination in EUV systems | Rik Jonckheere, Gian Francesco Lorusso, Ivan Pollentier | 2015-07-21 |
| 8006202 | Systems and methods for UV lithography | Gian Francesco Lorusso, In-Sung Kim, Byeong-Soo Kim, Rik Jonckheere, Jan Hermans | 2011-08-23 |
| 7750319 | Method and system for measuring contamination of a lithographical element | Gian Francesco Lorusso, Rik Jonckheere, Jan Hermans | 2010-07-06 |