Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11599019 | Method for forming an extreme ultraviolet lithography pellicle | Cedric Huyghebaert, Ivan Pollentier, Elie Schapmans, Emily Gallagher | 2023-03-07 |
| 11181818 | Lithography scanner | Emily Gallagher, Joern-Holger Franke, Ivan Pollentier, Marina Mariano Juste | 2021-11-23 |
| 11163229 | Induced stress for EUV pellicle tensioning | Marina Mariano Juste, Ivan Pollentier, Cedric Huyghebaert, Emily Gallagher | 2021-11-02 |
| 11092886 | Method for forming a pellicle | Emily Gallagher, Ivan Pollentier, Hanns Christoph Adelmann, Cedric Huyghebaert, Jae Uk Lee | 2021-08-17 |
| 10712659 | Method for forming a carbon nanotube pellicle membrane | Emily Gallagher, Cedric Huyghebaert, Ivan Pollentier, Hanns Christoph Adelmann, Jae Uk Lee | 2020-07-14 |
| 10374218 | Methods for forming lithium manganese oxide layers | Nouha Labyedh, Philippe M. Vereecken | 2019-08-06 |