Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7015468 | Methods of stabilizing measurement of ArF resist in CD-SEM | Amir Azordegan, Gian Francesco Lorusso, Mark A. Neil, Waiman Ng, Srini Vedula | 2006-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7015468 | Methods of stabilizing measurement of ArF resist in CD-SEM | Amir Azordegan, Gian Francesco Lorusso, Mark A. Neil, Waiman Ng, Srini Vedula | 2006-03-21 |