Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7015468 | Methods of stabilizing measurement of ArF resist in CD-SEM | Amir Azordegan, Gian Francesco Lorusso, Ananthanarayanan Mohan, Mark A. Neil, Waiman Ng | 2006-03-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7015468 | Methods of stabilizing measurement of ArF resist in CD-SEM | Amir Azordegan, Gian Francesco Lorusso, Ananthanarayanan Mohan, Mark A. Neil, Waiman Ng | 2006-03-21 |