Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429296 | Multilayer film metrology using an effective media approximation | Mikhail Sushchik, Natalia Malkova | 2019-10-01 |
| 10386233 | Variable resolution spectrometer | — | 2019-08-20 |
| 10151631 | Spectroscopy with tailored spectral sampling | Johannes D. de Veer | 2018-12-11 |
| 10141156 | Measurement of overlay and edge placement errors with an electron beam column array | Frank Laske | 2018-11-27 |
| 8658973 | Auger elemental identification algorithm | Mehran Nasser-Ghodsi, Christopher Sears | 2014-02-25 |
| 7241991 | Region-of-interest based electron beam metrology | Keith Standiford | 2007-07-10 |
| 7041976 | Automated focusing of electron image | Gian Francesco Lorusso, Gabor Toth, Varoujan Chakarian, Douglas K. Masnaghetti | 2006-05-09 |
| 7015468 | Methods of stabilizing measurement of ArF resist in CD-SEM | Amir Azordegan, Gian Francesco Lorusso, Ananthanarayanan Mohan, Waiman Ng, Srini Vedula | 2006-03-21 |