Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715995 | Apparatus and methods for electron beam lithography using array cathode | Alan D. Brodie, Paul F. Petric | 2017-07-25 |
| 9040942 | Electron beam lithography with linear column array and rotary stage | Alan D. Brodie | 2015-05-26 |
| 8063365 | Non-shot-noise-limited source for electron beam lithography or inspection | Alan D. Brodie | 2011-11-22 |
| 7241991 | Region-of-interest based electron beam metrology | Mark A. Neil | 2007-07-10 |
| 7084407 | Ion beam extractor with counterbore | Qing Ji, Tsu-Jae King, Ka-Ngo Leung | 2006-08-01 |