Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309202 | Overlay metrology on bonded wafers | Shankar Krishnan, David Y. Wang | 2022-04-19 |
| 10151631 | Spectroscopy with tailored spectral sampling | Mark A. Neil | 2018-12-11 |
| 9404872 | Selectably configurable multiple mode spectroscopic ellipsometry | Haiming Wang, Guorong V. Zhuang, Shankar Krishnan, Klaus Flock | 2016-08-02 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Catalin Filip +3 more | 2016-04-12 |
| 9228943 | Dynamically adjustable semiconductor metrology system | David Y. Wang, Guorong V. Zhuang, Kevin Peterlinz, Shankar Krishnan | 2016-01-05 |
| 9146156 | Light source tracking in optical metrology system | Guorong V. Zhuang, Shankar Krishnan, Klaus Flock, David Y. Wang, Lawrence D. Rotter | 2015-09-29 |
| 9116103 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Catalin Filip +3 more | 2015-08-25 |
| 8896832 | Discrete polarization scatterometry | Andrew V. Hill, Amnon Manassen, Daniel Kandel, Vladimir Levinski, Joel Seligson +3 more | 2014-11-25 |
| 8860937 | Metrology systems and methods for high aspect ratio and large lateral dimension structures | Thaddeus Gerard Dziura, Xuefeng Liu, David Y. Wang, Jonathan M. Madsen, Alexander Kuznetsov +3 more | 2014-10-14 |
| 8797534 | Optical system polarizer calibration | Leonid Poslavsky, G. Vera Zhuang, Shankar Krishnan | 2014-08-05 |
| 8570514 | Optical system polarizer calibration | Leonid Poslavsky, Guorong V. Zhuang, Shankar Krishnan | 2013-10-29 |
| 6999180 | Optical film topography and thickness measurement | Gary Janik, Hidong Kwak, Ying Gao | 2006-02-14 |