| 12164093 |
Reflective compact lens for magneto-optic Kerr effect metrology system |
Alex Zheng, Jun Wang, Chunxia Li, Changfei Yan, Rui Ni +7 more |
2024-12-10 |
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| 12013355 |
Methods and systems for compact, small spot size soft x-ray scatterometry |
Kerstin Purrucker, Michael Friedmann |
2024-06-18 |
$237,465,000 |
| 11913874 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2024-02-27 |
$308,280,000 |
| 11906770 |
Monolithic optical retarder |
Shankar Krishnan |
2024-02-20 |
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| 11309202 |
Overlay metrology on bonded wafers |
Shankar Krishnan, Johannes D. de Veer |
2022-04-19 |
$128,304,000 |
| 11231362 |
Multi-environment polarized infrared reflectometer for semiconductor metrology |
Guorong V. Zhuang, Shankar Krishnan, Xuefeng Liu, Mengmeng Ye, Dawei Hu |
2022-01-25 |
$447,355,000 |
| 11137350 |
Mid-infrared spectroscopy for measurement of high aspect ratio structures |
Shankar Krishnan, Guorong V. Zhuang |
2021-10-05 |
$383,357,000 |
| 11119050 |
Methods and systems for measurement of thick films and high aspect ratio structures |
Noam Sapiens, Shankar Krishnan, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz |
2021-09-14 |
$65,482,000 |
| 11043239 |
Magneto-optic Kerr effect metrology systems |
Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong +7 more |
2021-06-22 |
$382,382,000 |
| 10969328 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2021-04-06 |
$472,302,000 |
| 10801953 |
Semiconductor metrology based on hyperspectral imaging |
Alexander Buettner, Stilian Ivanov Pandev, Emanuel Saerchen, Andrei V. Shchegrov, Barry Blasenheim |
2020-10-13 |
|
| 10804167 |
Methods and systems for co-located metrology |
Esen Salcin, Michael Friedmann, Derrick Shaughnessy, Andrei V. Shchegrov, Jonathan M. Madsen +1 more |
2020-10-13 |
|
| 10690602 |
Methods and systems for measurement of thick films and high aspect ratio structures |
Noam Sapiens, Shankar Krishnan, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz |
2020-06-23 |
|
| 10234763 |
Method of providing photopatterned functional surfaces |
Silas Owusu-Nkwantabisah, Roberta Dileo Benedict |
2019-03-19 |
$708,000 |
| 10215693 |
Infrared spectroscopic reflectometer for measurement of high aspect ratio structures |
Shankar Krishnan |
2019-02-26 |
|
| 10215688 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2019-02-26 |
|
| 9970863 |
Optical metrology with reduced focus error sensitivity |
Shankar Krishnan, Guorong V. Zhuang, Xuefeng Liu |
2018-05-15 |
|
| 9921104 |
Simultaneous multi-angle spectroscopy |
Shankar Krishnan, Alexander Buettner, Kerstin Purrucker |
2018-03-20 |
|
| 9921152 |
Systems and methods for extended infrared spectroscopic ellipsometry |
Shankar Krishnan |
2018-03-20 |
|
| 9857292 |
Broadband and wide field angle compensator |
Lawrence D. Rotter, Klaus Flock, Muzammil Arain |
2018-01-02 |
|
| 9740309 |
Finger-driven computer mouse |
— |
2017-08-22 |
|
| 9519093 |
Broadband and wide field angle compensator |
Lawrence D. Rotter, Klaus Flock, Muzammil Arain |
2016-12-13 |
|
| 9400246 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2016-07-26 |
|
| 9310290 |
Multiple angles of incidence semiconductor metrology systems and methods |
Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more |
2016-04-12 |
|
| 9228943 |
Dynamically adjustable semiconductor metrology system |
Guorong V. Zhuang, Johannes D. de Veer, Kevin Peterlinz, Shankar Krishnan |
2016-01-05 |
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