Issued Patents All Time
Showing 25 most recent of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164093 | Reflective compact lens for magneto-optic Kerr effect metrology system | Alex Zheng, Jun Wang, Chunxia Li, Changfei Yan, Rui Ni +7 more | 2024-12-10 |
| 12013355 | Methods and systems for compact, small spot size soft x-ray scatterometry | Kerstin Purrucker, Michael Friedmann | 2024-06-18 |
| 11913874 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2024-02-27 |
| 11906770 | Monolithic optical retarder | Shankar Krishnan | 2024-02-20 |
| 11309202 | Overlay metrology on bonded wafers | Shankar Krishnan, Johannes D. de Veer | 2022-04-19 |
| 11231362 | Multi-environment polarized infrared reflectometer for semiconductor metrology | Guorong V. Zhuang, Shankar Krishnan, Xuefeng Liu, Mengmeng Ye, Dawei Hu | 2022-01-25 |
| 11137350 | Mid-infrared spectroscopy for measurement of high aspect ratio structures | Shankar Krishnan, Guorong V. Zhuang | 2021-10-05 |
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz | 2021-09-14 |
| 11043239 | Magneto-optic Kerr effect metrology systems | Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong +7 more | 2021-06-22 |
| 10969328 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2021-04-06 |
| 10801953 | Semiconductor metrology based on hyperspectral imaging | Alexander Buettner, Stilian Ivanov Pandev, Emanuel Saerchen, Andrei V. Shchegrov, Barry Blasenheim | 2020-10-13 |
| 10804167 | Methods and systems for co-located metrology | Esen Salcin, Michael Friedmann, Derrick Shaughnessy, Andrei V. Shchegrov, Jonathan M. Madsen +1 more | 2020-10-13 |
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz | 2020-06-23 |
| 10234763 | Method of providing photopatterned functional surfaces | Silas Owusu-Nkwantabisah, Roberta Dileo Benedict | 2019-03-19 |
| 10215693 | Infrared spectroscopic reflectometer for measurement of high aspect ratio structures | Shankar Krishnan | 2019-02-26 |
| 10215688 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2019-02-26 |
| 9970863 | Optical metrology with reduced focus error sensitivity | Shankar Krishnan, Guorong V. Zhuang, Xuefeng Liu | 2018-05-15 |
| 9921104 | Simultaneous multi-angle spectroscopy | Shankar Krishnan, Alexander Buettner, Kerstin Purrucker | 2018-03-20 |
| 9921152 | Systems and methods for extended infrared spectroscopic ellipsometry | Shankar Krishnan | 2018-03-20 |
| 9857292 | Broadband and wide field angle compensator | Lawrence D. Rotter, Klaus Flock, Muzammil Arain | 2018-01-02 |
| 9740309 | Finger-driven computer mouse | — | 2017-08-22 |
| 9519093 | Broadband and wide field angle compensator | Lawrence D. Rotter, Klaus Flock, Muzammil Arain | 2016-12-13 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2016-07-26 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more | 2016-04-12 |
| 9228943 | Dynamically adjustable semiconductor metrology system | Guorong V. Zhuang, Johannes D. de Veer, Kevin Peterlinz, Shankar Krishnan | 2016-01-05 |