| 11913874 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2024-02-27 |
| 10969328 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2021-04-06 |
| 10215688 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2019-02-26 |
| 10203247 |
Systems for providing illumination in optical metrology |
Gregory Brady, Andrei V. Shchegrov, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more |
2019-02-12 |
| 9857292 |
Broadband and wide field angle compensator |
Klaus Flock, Muzammil Arain, David Y. Wang |
2018-01-02 |
| 9519093 |
Broadband and wide field angle compensator |
Klaus Flock, Muzammil Arain, David Y. Wang |
2016-12-13 |
| 9512985 |
Systems for providing illumination in optical metrology |
Gregory Brady, Andrei V. Shchegrov, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more |
2016-12-06 |
| 9400246 |
Optical metrology tool equipped with modulated illumination sources |
Andrei V. Shchegrov, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more |
2016-07-26 |
| 9310290 |
Multiple angles of incidence semiconductor metrology systems and methods |
David Y. Wang, Klaus Flock, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more |
2016-04-12 |
| 9146156 |
Light source tracking in optical metrology system |
Guorong V. Zhuang, Shankar Krishnan, Johannes D. de Veer, Klaus Flock, David Y. Wang |
2015-09-29 |
| 9116103 |
Multiple angles of incidence semiconductor metrology systems and methods |
David Y. Wang, Klaus Flock, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more |
2015-08-25 |
| 8896832 |
Discrete polarization scatterometry |
Andrew V. Hill, Amnon Manassen, Daniel Kandel, Vladimir Levinski, Joel Seligson +3 more |
2014-11-25 |
| 8643841 |
Angle-resolved spectroscopic instrument |
David Y. Wang |
2014-02-04 |
| 8111399 |
System and method for performing photothermal measurements and relaxation compensation |
David Y. Wang, Derrick Shaughnessy, Mark Frederick Senko |
2012-02-07 |
| 7227637 |
Measurement system with separate optimized beam paths |
David Y. Wang, Jeffrey T. Fanton, Jeffrey E. McAninch |
2007-06-05 |
| 7154607 |
Flat spectrum illumination source for optical metrology |
James Hendrix, David Y. Wang, David M. Aikens, Joel Ng |
2006-12-26 |
| 7061614 |
Measurement system with separate optimized beam paths |
David Y. Wang, Jeffrey T. Fanton, Jeffrey E. McAninch |
2006-06-13 |
| 6784991 |
Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers |
David Y. Wang |
2004-08-31 |