Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11913874 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz +1 more | 2024-02-27 |
| 10976249 | Reflective pupil relay system | Andrew V. Hill | 2021-04-13 |
| 10969328 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz +1 more | 2021-04-06 |
| 10527830 | Off-axis reflective afocal optical relay | Andrew V. Hill | 2020-01-07 |
| 10215688 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz +1 more | 2019-02-26 |
| 10203247 | Systems for providing illumination in optical metrology | Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more | 2019-02-12 |
| 10062157 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Andrei V. Shchegrov, Noam Sapiens, John J. Hench | 2018-08-28 |
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Andrei V. Shchegrov, Noam Sapiens, John J. Hench | 2016-12-13 |
| 9512985 | Systems for providing illumination in optical metrology | Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more | 2016-12-06 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz +1 more | 2016-07-26 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer +3 more | 2016-04-12 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Andrei V. Shchegrov, Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Alexander Kuznetsov | 2016-02-09 |
| 9116103 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer +3 more | 2015-08-25 |
| 8982358 | Apparatus and method of measuring roughness and other parameters of a structure | Andrei V. Shchegrov, Kevin Peterlinz | 2015-03-17 |
| 6788423 | Conic constant measurement methods for refractive microlenses | Alan D. Kathman, Thomas J. Suleski, Alvaro Cruz-Cabrera | 2004-09-07 |