Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320763 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2025-06-03 |
| 11955391 | Process monitoring of deep structures with X-ray scatterometry | Antonio Arion Gellineau | 2024-04-09 |
| 11313816 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2022-04-26 |
| 11145559 | Process monitoring of deep structures with X-ray scatterometry | Antonio Arion Gellineau | 2021-10-12 |
| 11099137 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Antonio Arion Gellineau, Yin Xu, Kaiwen Xu +5 more | 2021-08-24 |
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Antonio Arion Gellineau, Yin Xu, Kaiwen Xu +5 more | 2020-10-06 |
| 10775323 | Full beam metrology for X-ray scatterometry systems | Antonio Arion Gellineau, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2020-09-15 |
| 10727142 | Process monitoring of deep structures with X-ray scatterometry | Antonio Arion Gellineau | 2020-07-28 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Noam Sapiens, Stilian Ivanov Pandev | 2020-04-07 |
| 10502694 | Methods and apparatus for patterned wafer characterization | Stilian Ivanov Pandev, Alexander Kuznetsov, Andrei V. Shchegrov | 2019-12-10 |
| 10352695 | X-ray scatterometry metrology for high aspect ratio structures | Antonio Arion Gellineau, Andrei V. Shchegrov | 2019-07-16 |
| 10325004 | Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu, John J. Hench | 2019-06-18 |
| 10255385 | Model optimization approach based on spectral sensitivity | Stilian Ivanov Pandev, Meng-Fu Shih, Lie-Quan Lee | 2019-04-09 |
| 10152678 | System, method and computer program product for combining raw data from multiple metrology tools | Stilian Ivanov Pandev, Andrei V. Shchegrov | 2018-12-11 |
| 10151986 | Signal response metrology based on measurements of proxy structures | Andrei V. Shchegrov, Stilian Ivanov Pandev, Leonid Poslavsky | 2018-12-11 |
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Noam Sapiens, Stilian Ivanov Pandev | 2017-11-14 |
| 9778213 | Metrology tool with combined XRF and SAXS capabilities | Michael S. Bakeman, Andrei V. Shchegrov, Kevin Peterlinz | 2017-10-03 |
| 9535018 | Combined x-ray and optical metrology | Kevin Peterlinz, Andrei V. Shchegrov, Michael S. Bakeman | 2017-01-03 |
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Noam Sapiens, Stilian Ivanov Pandev | 2016-11-08 |
| 9435735 | Optical parametric model optimization | — | 2016-09-06 |
| 9310296 | Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu, John J. Hench | 2016-04-12 |
| 9311431 | Secondary target design for optical measurements | Sungchul Yoo, Andrei V. Shchegrov, Inkyo Kim, Seunghwan Lee, ByeoungSu Hwang +1 more | 2016-04-12 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Andrei V. Shchegrov, Gregory Brady, Stilian Ivanov Pandev, Alexander Kuznetsov | 2016-02-09 |
| 8879073 | Optical metrology using targets with field enhancement elements | Jonathan M. Madsen, Andrei V. Shchegrov, Michael S. Bakeman, Alexander Kuznetsov, Bin-Ming Benjamin Tsai | 2014-11-04 |
| 8860937 | Metrology systems and methods for high aspect ratio and large lateral dimension structures | Xuefeng Liu, David Y. Wang, Jonathan M. Madsen, Alexander Kuznetsov, Johannes D. de Veer +3 more | 2014-10-14 |