Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360062 | Methods and systems for regularizing the optimization of application specific semiconductor measurement system parameter settings | Christopher Liman, Bindi M. Nagda | 2025-07-15 |
| 12320763 | Full beam metrology for x-ray scatterometry systems | Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2025-06-03 |
| 12019030 | Methods and systems for targeted monitoring of semiconductor measurement quality | Andrei V. Shchegrov, Hyowon Park, Pavan Gurudath, Christopher Liman, Jung Heon Song | 2024-06-25 |
| 11990380 | Methods and systems for combining x-ray metrology data sets to improve parameter estimation | Christopher Liman, Andrei V. Shchegrov, Sungchul Yoo | 2024-05-21 |
| 11955391 | Process monitoring of deep structures with X-ray scatterometry | Thaddeus Gerard Dziura | 2024-04-09 |
| 11698251 | Methods and systems for overlay measurement based on soft X-ray Scatterometry | Andrei V. Shchegrov, Nadav Gutman, Alexander Kuznetsov | 2023-07-11 |
| 11519719 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Sergey Zalubovsky | 2022-12-06 |
| 11519869 | Methods and systems for real time measurement control | — | 2022-12-06 |
| 11313816 | Full beam metrology for x-ray scatterometry systems | Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2022-04-26 |
| 11145559 | Process monitoring of deep structures with X-ray scatterometry | Thaddeus Gerard Dziura | 2021-10-12 |
| 11099137 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Yin Xu, Kaiwen Xu +5 more | 2021-08-24 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Alexander N. Bykanov, Nikolay Artemiev, Joseph A. Di Regolo, Alexander Kuznetsov, Andrei Veldman +1 more | 2021-07-27 |
| 10983227 | On-device metrology using target decomposition | John J. Hench, Alexander Kuznetsov | 2021-04-20 |
| 10816486 | Multilayer targets for calibration and alignment of X-ray based measurement systems | Nikolay Artemiev, Alexander N. Bykanov, Alexander Kuznetsov | 2020-10-27 |
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Yin Xu, Kaiwen Xu +5 more | 2020-10-06 |
| 10775323 | Full beam metrology for X-ray scatterometry systems | Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2020-09-15 |
| 10767978 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Sergey Zalubovsky | 2020-09-08 |
| 10727142 | Process monitoring of deep structures with X-ray scatterometry | Thaddeus Gerard Dziura | 2020-07-28 |
| 10504759 | Semiconductor metrology with information from multiple processing steps | Alexander Kuznetsov, Andrei V. Shchegrov | 2019-12-10 |
| 10481111 | Calibration of a small angle X-ray scatterometry based metrology system | John J. Hench, Nikolay Artemiev, Joseph A. Di Regolo | 2019-11-19 |
| 10352695 | X-ray scatterometry metrology for high aspect ratio structures | Thaddeus Gerard Dziura, Andrei V. Shchegrov | 2019-07-16 |
| 9267963 | Interferometric atomic-force microscopy device and method | Olav Solgaard, Karthik Vijayraghavan, Andrew Y J Wang, Manish J. Butte | 2016-02-23 |