Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025575 | Soft x-ray optics with improved filtering | Alexander Kuznetsov, Boxue Chen | 2024-07-02 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Oleg Khodykin, Andrei V. Shchegrov, Alexander Kuznetsov, Michael Friedmann | 2022-05-17 |
| 11143604 | Soft x-ray optics with improved filtering | Alexander Kuznetsov, Boxue Chen | 2021-10-12 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Alexander N. Bykanov, Joseph A. Di Regolo, Antonio Arion Gellineau, Alexander Kuznetsov, Andrei Veldman +1 more | 2021-07-27 |
| 10859518 | X-ray zoom lens for small angle x-ray scatterometry | Michael Friedmann | 2020-12-08 |
| 10816486 | Multilayer targets for calibration and alignment of X-ray based measurement systems | Antonio Arion Gellineau, Alexander N. Bykanov, Alexander Kuznetsov | 2020-10-27 |
| 10481111 | Calibration of a small angle X-ray scatterometry based metrology system | John J. Hench, Antonio Arion Gellineau, Joseph A. Di Regolo | 2019-11-19 |
| 10359377 | Beam shaping slit for small spot size transmission small angle X-ray scatterometry | Alexander N. Bykanov, Joseph A. Di Regolo, John Viatella | 2019-07-23 |