Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025575 | Soft x-ray optics with improved filtering | Alexander Kuznetsov, Nikolay Artemiev | 2024-07-02 |
| 11143604 | Soft x-ray optics with improved filtering | Alexander Kuznetsov, Nikolay Artemiev | 2021-10-12 |
| 10712145 | Hybrid metrology for patterned wafer characterization | Andrei Veldman, Alexander Kuznetsov, Andrei V. Shchegrov | 2020-07-14 |