Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025575 | Soft x-ray optics with improved filtering | Boxue Chen, Nikolay Artemiev | 2024-07-02 |
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2024-01-23 |
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Manh Dang Nguyen, Stilian Ivanov Pandev +8 more | 2023-10-24 |
| 11698251 | Methods and systems for overlay measurement based on soft X-ray Scatterometry | Andrei V. Shchegrov, Nadav Gutman, Antonio Arion Gellineau | 2023-07-11 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |
| 11536674 | Systems and methods for combined reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Oleg Khodykin | 2022-12-27 |
| 11460418 | Methods and systems for semiconductor metrology based on wavelength resolved soft X-ray reflectometry | Chao Chang | 2022-10-04 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Manh Dang Nguyen, Stilian Ivanov Pandev +8 more | 2022-07-05 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Oleg Khodykin, Andrei V. Shchegrov, Nikolay Artemiev, Michael Friedmann | 2022-05-17 |
| 11156548 | Measurement methodology of advanced nanostructures | Manh Dang Nguyen, Phillip Atkins, Liequan Lee, Natalia Malkova, Paul Aoyagi +3 more | 2021-10-26 |
| 11143604 | Soft x-ray optics with improved filtering | Boxue Chen, Nikolay Artemiev | 2021-10-12 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Alexander N. Bykanov, Nikolay Artemiev, Joseph A. Di Regolo, Antonio Arion Gellineau, Andrei Veldman +1 more | 2021-07-27 |
| 11036898 | Measurement models of nanowire semiconductor structures based on re-useable sub-structures | Houssam Chouaib | 2021-06-15 |
| 10983227 | On-device metrology using target decomposition | John J. Hench, Antonio Arion Gellineau | 2021-04-20 |
| 10895541 | Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Oleg Khodykin | 2021-01-19 |
| 10816486 | Multilayer targets for calibration and alignment of X-ray based measurement systems | Nikolay Artemiev, Antonio Arion Gellineau, Alexander N. Bykanov | 2020-10-27 |
| 10804167 | Methods and systems for co-located metrology | David Y. Wang, Esen Salcin, Michael Friedmann, Derrick Shaughnessy, Andrei V. Shchegrov +1 more | 2020-10-13 |
| 10769320 | Integrated use of model-based metrology and a process model | Andrei V. Shchegrov, Stilian Ivanov Pandev | 2020-09-08 |
| 10712145 | Hybrid metrology for patterned wafer characterization | Boxue Chen, Andrei Veldman, Andrei V. Shchegrov | 2020-07-14 |
| 10580673 | Semiconductor metrology and defect classification using electron microscopy | Stilian Ivanov Pandev | 2020-03-03 |
| 10502694 | Methods and apparatus for patterned wafer characterization | Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Andrei V. Shchegrov | 2019-12-10 |
| 10504759 | Semiconductor metrology with information from multiple processing steps | Antonio Arion Gellineau, Andrei V. Shchegrov | 2019-12-10 |
| 10352876 | Signal response metrology for scatterometry based overlay measurements | Andrei V. Shchegrov, Stilian Ivanov Pandev, Jonathan M. Madsen, Walter D. Mieher | 2019-07-16 |
| 10215559 | Metrology of multiple patterning processes | Stilian Ivanov Pandev, Dzmitry Sanko | 2019-02-26 |