Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887835 | Laser-sustained plasma lamps with graded concentration of hydroxyl radical | Ilya Bezel | 2024-01-30 |
| 11536674 | Systems and methods for combined reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Alexander Kuznetsov | 2022-12-27 |
| 11419202 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese | 2022-08-16 |
| 11343899 | Droplet generation for a laser produced plasma light source | Brian Ahr, Alexander N. Bykanov, Rudy F. Garcia, Layton Hale | 2022-05-24 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Andrei V. Shchegrov, Alexander Kuznetsov, Nikolay Artemiev, Michael Friedmann | 2022-05-17 |
| 11317500 | Bright and clean x-ray source for x-ray based metrology | — | 2022-04-26 |
| 11035804 | System and method for x-ray imaging and classification of volume defects | Richard W. Solarz, Bosheng Zhang, Steven R. Lange | 2021-06-15 |
| 10959318 | X-ray metrology system with broadband laser produced plasma illuminator | Alexander N. Bykanov | 2021-03-23 |
| 10895541 | Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Alexander Kuznetsov | 2021-01-19 |
| 10893599 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese | 2021-01-12 |
| 10880979 | Droplet generation for a laser produced plasma light source | Brian Ahr, Alexander N. Bykanov, Rudy F. Garcia, Layton Hale | 2020-12-29 |
| 10806016 | High power broadband illumination source | Ilya Bezel | 2020-10-13 |
| 10101664 | Apparatus and methods for optics protection from debris in plasma-based light source | Alexey Kuritsyn, Ye Liu, Michael P. Kanouff | 2018-10-16 |
| 10034362 | Plasma-based light source | Alexey Kuritsyn, Alexander N. Bykanov, Michael P. Kanouff | 2018-07-24 |
| 10021773 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese | 2018-07-10 |
| 9989758 | Debris protection system for reflective optic utilizing gas flow | Alexey Kuritsyn, Alexander N. Bykanov | 2018-06-05 |
| 9918375 | Plasma based light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Ye Liu | 2018-03-13 |
| 9544984 | System and method for generation of extreme ultraviolet light | Alexander N. Bykanov, Daniel Wack, Konstantin Tsigutkin, Layton Hale, Joseph F. Walsh +3 more | 2017-01-10 |
| 9420678 | System and method for producing an exclusionary buffer gas flow in an EUV light source | Alexander N. Bykanov | 2016-08-16 |
| 9295147 | EUV light source using cryogenic droplet targets in mask inspection | Alexander N. Bykanov, Daniel Wack | 2016-03-22 |
| 9151881 | Phase grating for mask inspection system | Daimian Wang, Daniel Wack, Li-Ping Wang, Yanwei Liu | 2015-10-06 |