Issued Patents All Time
Showing 25 most recent of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198921 | Laser-sustained plasma light source with tapered window | Amir Torkaman | 2025-01-14 |
| 12033845 | Laser-sustained plasma source based on colliding liquid jets | John Szilagyi | 2024-07-09 |
| 11978620 | Swirler for laser-sustained plasma light source with reverse vortex flow | Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Amir Torkaman | 2024-05-07 |
| 11921297 | System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution | Matthew Derstine, Andrey Evgenievich Stepanov, Nikolay Sherbak | 2024-03-05 |
| 11887835 | Laser-sustained plasma lamps with graded concentration of hydroxyl radical | Oleg Khodykin | 2024-01-30 |
| 11844172 | System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources | John Szilagyi | 2023-12-12 |
| 11776804 | Laser-sustained plasma light source with reverse vortex flow | Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Vitaly K. Rerikh, Boris Vasilyevich Potapkin | 2023-10-03 |
| 11778720 | High efficiency laser-sustained plasma light source with collection of broadband radiation | Matthew Derstine, Anatoly Shchemelinin, Eugene Shifrin | 2023-10-03 |
| 11690162 | Laser-sustained plasma light source with gas vortex flow | Andrey Evgenievich Stepanov, Leonid Borisovich Zvedenuk, Yuriy Gennadievich Kutsenko, Boris Vasilyevich Potapkin, Sumeet Kumar | 2023-06-27 |
| 11596048 | Rotating lamp for laser-sustained plasma illumination source | Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Maksim Alexandrovich Deminskii, Boris Vasilyevich Potapkin | 2023-02-28 |
| 11262591 | System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution | Matthew Derstine, Andrey Evgenievich Stepanov, Nikolay Sherbak | 2022-03-01 |
| 11138722 | Differential imaging for single-path optical wafer inspection | Anatoly Shchemelinin, Eugene Shifrin | 2021-10-05 |
| 11121521 | System and method for pumping laser sustained plasma with interlaced pulsed illumination sources | Matthew Derstine, William Alexander Schumaker, Michael Friedmann | 2021-09-14 |
| 11035727 | Spectrometer for vacuum ultraviolet measurements in high-pressure environment | Anatoly Shchemelinin | 2021-06-15 |
| 10976025 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more | 2021-04-13 |
| 10887974 | High efficiency laser-sustained plasma light source | Matthew Derstine, Anatoly Shchemelinin, Eugene Shifrin | 2021-01-05 |
| 10823943 | Plasma source with lamp house correction | Shiyu Zhang | 2020-11-03 |
| 10806016 | High power broadband illumination source | Oleg Khodykin | 2020-10-13 |
| 10714327 | System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination | Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine | 2020-07-14 |
| 10714307 | Neutral atom imaging system | Eugene Shifrin, Gildardo Delgado, Rudy F. Garcia | 2020-07-14 |
| 10691024 | High-power short-pass total internal reflection filter | Wei Zhao | 2020-06-23 |
| 10690589 | Laser sustained plasma light source with forced flow through natural convection | Kenneth P. Gross, John Szilagyi | 2020-06-23 |
| 10616987 | System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter | Wei Zhao, Kenneth P. Gross, Matthew Panzer | 2020-04-07 |
| 10568195 | System and method for pumping laser sustained plasma with a frequency converted illumination source | Anatoly Shchemelinin, Matthew Derstine | 2020-02-18 |
| 10520741 | System and method for separation of pump light and collected light in a laser pumped light source | Anatoly Shchemelinin, Matthew Panzer, Eugene Shifrin | 2019-12-31 |