JS

John Szilagyi

KL Kla: 2 patents #202 of 758Top 30%
KL Kla-Tencor: 1 patents #809 of 1,394Top 60%
Overall (All Time): #1,368,740 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12033845 Laser-sustained plasma source based on colliding liquid jets Ilya Bezel 2024-07-09
11844172 System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources Ilya Bezel 2023-12-12
10690589 Laser sustained plasma light source with forced flow through natural convection Ilya Bezel, Kenneth P. Gross 2020-06-23