Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690589 | Laser sustained plasma light source with forced flow through natural convection | Ilya Bezel, John Szilagyi | 2020-06-23 |
| 10616987 | System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter | Wei Zhao, Ilya Bezel, Matthew Panzer | 2020-04-07 |
| 10386234 | Wideband spectrograph | — | 2019-08-20 |
| 10283342 | Laser sustained plasma light source with graded absorption features | Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer, Anant Chimmalgi, Lauren Wilson +1 more | 2019-05-07 |
| 10139283 | Non-contact thermal measurements of VUV optics | Anatoly Shchemelinin, Ilya Bezel | 2018-11-27 |
| 9899205 | System and method for inhibiting VUV radiative emission of a laser-sustained plasma source | Ilya Bezel, Lauren Wilson, Rahul Yadav, Joshua Wittenberg, Aizaz Bhuiyan +3 more | 2018-02-20 |
| 9887076 | Method and system for controlling convective flow in a light-sustained plasma | Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, David W. Shortt, Wei Zhao +2 more | 2018-02-06 |
| 9615439 | System and method for inhibiting radiative emission of a laser-sustained plasma source | Ilya Bezel, Anatoly Shchemelinin, Richard W. Solarz, Lauren Wilson, Rahul Yadav +4 more | 2017-04-04 |
| 9558858 | System and method for imaging a sample with a laser sustained plasma illumination output | David W. Shortt, Steven R. Lange, Matthew Derstine, Wei Zhao, Ilya Bezel +1 more | 2017-01-31 |
| 9390902 | Method and system for controlling convective flow in a light-sustained plasma | Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, David W. Shortt, Wei Zhao +2 more | 2016-07-12 |
| 8643840 | Cell for light source | Yung-Ho Alex Chuang, John Fielden | 2014-02-04 |
| 8581154 | Method for effectuating temperature control in roller grills | Roger A. Schwierking, Diosdado G. Pangan | 2013-11-12 |
| 8148669 | Apparatus and method for effectuating temperature control in roller grills | Roger A. Schwierking, Diosdado G. Pangan | 2012-04-03 |
| 8045250 | Optical scanning using rotating parallel plate | — | 2011-10-25 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7477371 | Process and assembly for non-destructive surface inspections | Norbert Marxer, Hubert Altendorfer, George Kren | 2009-01-13 |
| 7463369 | Systems and methods for measuring one or more characteristics of patterned features on a specimen | Dan Wack, Haiming Wang | 2008-12-09 |
| 7433037 | System for measuring periodic structures | Guoheng Zhao, Rodney Smedt, Mehrdad Nikoonahad | 2008-10-07 |
| 7379183 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +6 more | 2008-05-27 |
| 7317531 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +10 more | 2008-01-08 |
| 7277172 | Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals | Daniel Kandel, Michael Friedmann, Jiyou Fu, Shakar Krishnan, Boris Golovanevsky | 2007-10-02 |
| 7102744 | Process and assembly for non-destructive surface inspections | Norbert Marxer, Hubert Altendorfer, George Kren | 2006-09-05 |
| 6721052 | Systems for measuring periodic structures | Guoheng Zhao, Rodney Smedt, Mehrdad Nikoonahad | 2004-04-13 |
| 6692129 | Display apparatus including RGB color combiner and 1D light valve relay including schlieren filter | Paul K. Manhart, Richard A. Buchroeder | 2004-02-17 |
| 6606153 | Process and assembly for non-destructive surface inspections | Norbert Marxer, Hubert Altendorfer, George Kren | 2003-08-12 |