Issued Patents All Time
Showing 25 most recent of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682570 | Process-induced displacement characterization during semiconductor production | Pradeep Vukkadala, Mark D. Smith, Prasanna Dighe, Dieter Mueller | 2023-06-20 |
| 11360398 | System and method for tilt calculation based on overlay metrology measurements | Roie Volkovich, Paul MacDonald, Jincheng Pei, Jinyan Song, Amnon Manassen | 2022-06-14 |
| 11164768 | Process-induced displacement characterization during semiconductor production | Pradeep Vukkadala, Mark D. Smith, Prasanna Dighe, Dieter Mueller | 2021-11-02 |
| 10475712 | System and method for process-induced distortion prediction during wafer deposition | Mark D. Smith | 2019-11-12 |
| 10466596 | System and method for field-by-field overlay process control using measured and estimated field parameters | Bill Pierson, Ramkumar Karur-Shanmugam, Chin-Chou Huang, John Robinson | 2019-11-05 |
| 10451412 | Apparatus and methods for detecting overlay errors using scatterometry | Michael Adel, Walter D. Mieher, Ibrahim Abdulhalim, Michael Friedmann | 2019-10-22 |
| 10409171 | Overlay control with non-zero offset prediction | Michael Adel, Amnon Manassen, William Pierson, Pradeep Subrahmanyan, Liran Yerushalmi +4 more | 2019-09-10 |
| 10216096 | Process-sensitive metrology systems and methods | Myungjun Lee, Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Dzmitry Sanko +1 more | 2019-02-26 |
| 10030965 | Model-based hot spot monitoring | Stilian Ivanov Pandev, Sanjay Kapasi, Mark D. Smith | 2018-07-24 |
| 10024654 | Method and system for determining in-plane distortions in a substrate | Mark D. Smith, Jose Solomon, Stuart Sherwin, Walter D. Mieher | 2018-07-17 |
| 9903711 | Feed forward of metrology data in a metrology system | Daniel Kandel, Michael Adel, Leonid Poslavsky, John Robinson, Tal Marciano +9 more | 2018-02-27 |
| 9875946 | On-device metrology | Andrei V. Shchegrov, Jonathan M. Madsen, Stilian Ivanov Pandev, Daniel Kandel, Michael Adel +1 more | 2018-01-23 |
| 9846132 | Small-angle scattering X-ray metrology systems and methods | Michael S. Bakeman, Andrei V. Shchegrov, Guorong V. Zhuang, John J. Hench | 2017-12-19 |
| 9702693 | Apparatus for measuring overlay errors | Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack | 2017-07-11 |
| 9576861 | Method and system for universal target based inspection and metrology | Allen Park, Ellis Chang, Michael Adel, Kris Bhaskar, Amir Widmann +2 more | 2017-02-21 |
| 9222771 | Acquisition of information for a construction site | Eliezer Rosengaus, Kris Bhaskar | 2015-12-29 |
| 8604447 | Solar metrology methods and apparatus | Scott A. Young, Guoheng Zhao, Marco Guevremont, Neeraj Khanna | 2013-12-10 |
| 8502979 | Methods and systems for determining a critical dimension and overlay of a specimen | Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad, Dan Wack +2 more | 2013-08-06 |
| 8436554 | LED solar illuminator | Guoheng Zhao, Alex Salnik, Mehdi Vaez-Iravani, Lena Nicolaides, Samuel Ngai | 2013-05-07 |
| 8415961 | Measuring sheet resistance and other properties of a semiconductor | Guoheng Zhao, Alex Salnik, Lena Nicolaides | 2013-04-09 |
| 8330281 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack | 2012-12-11 |
| 8179530 | Methods and systems for determining a critical dimension and overlay of a specimen | Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad, Dan Wack +2 more | 2012-05-15 |
| 8023110 | Priori crack detection in solar photovoltaic wafers by detecting bending at edges of wafers | Samuel Ngai | 2011-09-20 |
| 7989729 | Detecting and repairing defects of photovoltaic devices | Guoheng Zhao, George H. Zapalac, Jr., Samuel Ngai, Mehdi Vaez-Iravani | 2011-08-02 |
| 7951672 | Measurement and control of strained devices | Daniel Wack, John Fielden | 2011-05-31 |