EC

Ellis Chang

KL Kla-Tencor: 26 patents #73 of 1,394Top 6%
KL Kla: 1 patents #347 of 758Top 50%
Overall (All Time): #145,133 of 4,157,543Top 4%
27
Patents All Time

Issued Patents All Time

Showing 25 most recent of 27 patents

Patent #TitleCo-InventorsDate
11348222 Methods and systems for inspection of wafers and reticles using designer intent data Paul Frank Marella, Sharon McCauley, William Volk, James Wiley, Sterling Watson +2 more 2022-05-31
11295438 Method and system for mixed mode wafer inspection Jason Z. Lin, Allen Park, Richard Wallingford, Songnian Rong, Chetana Bhaskar 2022-04-05
10713771 Methods and systems for inspection of wafers and reticles using designer intent data Paul Frank Marella, Sharon McCauley, William Volk, James Wiley, Sterling Watson +2 more 2020-07-14
10387608 Metrology target identification, design and verification Michael Adel, Tal Shusterman, Chen Dror 2019-08-20
10192303 Method and system for mixed mode wafer inspection Jason Z. Lin, Allen Park, Richard Wallingford, Songnian Rong, Chetana Bhaskar 2019-01-29
9910953 Metrology target identification, design and verification Michael Adel, Tal Shusterman, Chen Dror 2018-03-06
9659670 Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer SunYong Choi, YeonHo Pae 2017-05-23
9576861 Method and system for universal target based inspection and metrology Allen Park, Michael Adel, Kris Bhaskar, Ady Levy, Amir Widmann +2 more 2017-02-21
9518932 Metrology optimized inspection Allen Park, Craig MacNaughton 2016-12-13
9401014 Methods and systems for utilizing design data in combination with inspection data Khurram Zafar, Sagar A. Kekare, Allen Park, Peter Rose 2016-07-26
9170209 Inspection guided overlay metrology Amir Widmann, Allen Park 2015-10-27
9151712 Rule checking for metrology and inspection Michael Adel 2015-10-06
9087367 Determining design coordinates for wafer defects Michael J. Van Riet, Allen Park, Khurram Zafar, Santosh Bhattacharyya 2015-07-21
9002497 Methods and systems for inspection of wafers and reticles using designer intent data William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess +2 more 2015-04-07
8989479 Region based virtual fourier filter Lisheng Gao, Kenong Wu, Allen Park, Khurram Zafar, Junqing Huang +5 more 2015-03-24
8948495 Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer Gino Marcuccilli, Amir Widmann, John Robinson, Allen Park 2015-02-03
8923600 Methods and systems for utilizing design data in combination with inspection data Khurram Zafar, Sagar A. Kekare, Allen Park, Peter Rose 2014-12-30
8826200 Alteration for wafer inspection Allen Park 2014-09-02
8594823 Scanner performance comparison and matching using design and defect data Allen Park, Masami Aoki, Chris Chih-Chien Young, Martin Plihal, Michael J. Van Riet 2013-11-26
8559001 Inspection guided overlay metrology Amir Widmann, Allen Park 2013-10-15
8194968 Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions Allen Park, Peter Rose, Brian Duffy, Mark A. McCord, Gordon Abbott 2012-06-05
8139844 Methods and systems for determining a defect criticality index for defects on wafers Chien-Huei Chen, Yan Xiong, Jianxin Zhang, Tsung-Pao Fang 2012-03-20
7904845 Determining locations on a wafer to be reviewed during defect review Christophe David Fouquet, Gordon Abbott, Zain Saidin 2011-03-08
7711514 Computer-implemented methods, carrier media, and systems for generating a metrology sampling plan Allen Park 2010-05-04
7570796 Methods and systems for utilizing design data in combination with inspection data Khurram Zafar, Sagar A. Kekare, Allen Park, Peter Rose 2009-08-04