Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295438 | Method and system for mixed mode wafer inspection | Jason Z. Lin, Allen Park, Ellis Chang, Richard Wallingford, Chetana Bhaskar | 2022-04-05 |
| 10192303 | Method and system for mixed mode wafer inspection | Jason Z. Lin, Allen Park, Ellis Chang, Richard Wallingford, Chetana Bhaskar | 2019-01-29 |
| 10181185 | Image based specimen process control | Allen Park, Lisheng Gao, Ashok Kulkarni, Saibal Banerjee, Ping Gu +1 more | 2019-01-15 |
| 9576861 | Method and system for universal target based inspection and metrology | Allen Park, Ellis Chang, Michael Adel, Kris Bhaskar, Ady Levy +2 more | 2017-02-21 |
| 9360863 | Data perturbation for wafer inspection or metrology setup using a model of a difference | Govind Thattaisundaram, Mohan Mahadevan, Ajay Gupta, Chien-Huei Chen, Ashok Kulkarni +2 more | 2016-06-07 |
| 9053390 | Automated inspection scenario generation | Mohan Mahadevan, Govind Thattaisundaram, Ajay Gupta, Chien-Huei Chen, Jason Kirkwood +3 more | 2015-06-09 |
| 8989479 | Region based virtual fourier filter | Lisheng Gao, Kenong Wu, Allen Park, Ellis Chang, Khurram Zafar +5 more | 2015-03-24 |