Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100132 | Laser anneal pattern suppression | Jan Lauber | 2024-09-24 |
| 11774371 | Defect size measurement using deep learning methods | Jan Lauber | 2023-10-03 |
| 10854486 | System and method for characterization of buried defects | Jan Lauber | 2020-12-01 |
| 10605744 | Systems and methods for detecting defects on a wafer | Lu Chen, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2020-03-31 |
| 10067072 | Methods and apparatus for speckle suppression in laser dark-field systems | Vaibhav Gaind | 2018-09-04 |
| 9880107 | Systems and methods for detecting defects on a wafer | Lu Chen, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2018-01-30 |
| 9360863 | Data perturbation for wafer inspection or metrology setup using a model of a difference | Govind Thattaisundaram, Mohan Mahadevan, Ajay Gupta, Chien-Huei Chen, Ashok Kulkarni +2 more | 2016-06-07 |
| 9053390 | Automated inspection scenario generation | Mohan Mahadevan, Govind Thattaisundaram, Ajay Gupta, Chien-Huei Chen, Ashok Kulkarni +3 more | 2015-06-09 |
| 8467047 | Systems and methods for detecting defects on a wafer | Lu Chen, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2013-06-18 |
| 8223327 | Systems and methods for detecting defects on a wafer | Lu Chen, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2012-07-17 |
| 8049877 | Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system | Richard Wallingford, Stephanie Chen, Tao Luo, Yong Zhang, Lisheng Gao | 2011-11-01 |
| 6966402 | Acoustical heat shield | Calin Matias, Mark Boogemans | 2005-11-22 |