| 11783470 |
Design-assisted inspection for DRAM and 3D NAND devices |
Hucheng Lee, Sangbong Park, Xiaochun Li |
2023-10-10 |
| 11308606 |
Design-assisted inspection for DRAM and 3D NAND devices |
Hucheng Lee, Sangbong Park, Xiaochun Li |
2022-04-19 |
| 11270430 |
Wafer inspection using difference images |
Abdurrahman Sezginer, Xiaochun Li, Pavan Kumar, Lisheng Gao, Grace Hsiu-Ling Chen +2 more |
2022-03-08 |
| 10923317 |
Detecting defects in a logic region on a wafer |
Paul Russell, Hucheng Lee, Kenong Wu |
2021-02-16 |
| 10605744 |
Systems and methods for detecting defects on a wafer |
Lu Chen, Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao +2 more |
2020-03-31 |
| 10599944 |
Visual feedback for inspection algorithms and filters |
Hucheng Lee, Lisheng Gao |
2020-03-24 |
| 10600177 |
Nuisance reduction using location-based attributes |
Bjorn Brauer, Lisheng Gao |
2020-03-24 |
| 10395359 |
Adaptive local threshold and color filtering |
Hucheng Lee, Kenong Wu, Lisheng Gao |
2019-08-27 |
| 10339262 |
System and method for defining care areas in repeating structures of design data |
Soren Konecky, Hucheng Lee, Kenong Wu, Lisheng Gao |
2019-07-02 |
| 9880107 |
Systems and methods for detecting defects on a wafer |
Lu Chen, Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao +2 more |
2018-01-30 |
| 9704234 |
Adaptive local threshold and color filtering |
Hucheng Lee, Kenong Wu, Lisheng Gao |
2017-07-11 |
| 9619876 |
Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes |
Lisheng Gao |
2017-04-11 |
| 9442077 |
Scratch filter for wafer inspection |
Huan Jin, Grace Hsiu-Ling Chen, Lisheng Gao |
2016-09-13 |
| 9224660 |
Tuning wafer inspection recipes using precise defect locations |
Ashok Kulkarni, Lisheng Gao |
2015-12-29 |
| 9053527 |
Detecting defects on a wafer |
Jun Lang, Kan-Nan Chen, Lisheng Gao |
2015-06-09 |
| 8989479 |
Region based virtual fourier filter |
Lisheng Gao, Kenong Wu, Allen Park, Ellis Chang, Khurram Zafar +5 more |
2015-03-24 |
| 8775101 |
Detecting defects on a wafer |
Yong Zhang, Stephanie Chen, Tao Luo, Lisheng Gao, Richard Wallingford |
2014-07-08 |
| 8467047 |
Systems and methods for detecting defects on a wafer |
Lu Chen, Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao +2 more |
2013-06-18 |
| 8223327 |
Systems and methods for detecting defects on a wafer |
Lu Chen, Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao +2 more |
2012-07-17 |
| 8059886 |
Adaptive signature detection |
Yong Gao, Lisheng Gao |
2011-11-15 |