JL

Jan Lauber

KL Kla-Tencor: 10 patents #185 of 1,394Top 15%
KL Kla: 4 patents #87 of 758Top 15%
Overall (All Time): #339,912 of 4,157,543Top 9%
14
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12100132 Laser anneal pattern suppression Jason Kirkwood 2024-09-24
11774371 Defect size measurement using deep learning methods Jason Kirkwood 2023-10-03
11244442 Method and system for correlating optical images with scanning electron microscopy images Hucheng Lee, Lisheng Gao, Yong Zhang 2022-02-08
10997710 Adaptive care areas for die-die inspection Himanshu Vajaria, Yong Zhang 2021-05-04
10854486 System and method for characterization of buried defects Jason Kirkwood 2020-12-01
10522376 Multi-step image alignment method for large offset die-die inspection Himanshu Vajaria, Yong Zhang 2019-12-31
10483081 Self directed metrology and pattern classification Allen Park, Ajay Gupta 2019-11-19
10410338 Method and system for correlating optical images with scanning electron microscopy images Hucheng Lee, Lisheng Gao, Yong Zhang 2019-09-10
9311698 Detecting defects on a wafer using template image matching Xing Chu, J. Rex Runyon 2016-04-12
9293298 Defect discovery and inspection sensitivity optimization using automated classification of corresponding electron beam images 2016-03-22
8106355 Automated inspection using cell-cell subtraction perpendicular to stage motion direction Mark A. McCord 2012-01-31
7831083 Image quality monitoring for substrate inspection 2010-11-09
6828571 Apparatus and methods of controlling surface charge and focus Mark A. McCord, Paul F. Petric, Ross W. Thompson, Jason Lim, Frank Fan +1 more 2004-12-07
6664546 In-situ probe for optimizing electron beam inspection and metrology based on surface potential Mark A. McCord, Jun Pei, Jorge Pablo Fernandez 2003-12-16