RT

Ross W. Thompson

KL Kla-Tencor: 1 patents #316 of 626Top 55%
Overall (All Time): #3,497,470 of 4,157,543Top 85%
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6828571 Apparatus and methods of controlling surface charge and focus Mark A. McCord, Jan Lauber, Paul F. Petric, Jason Lim, Frank Fan +1 more 2004-12-07