Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9311698 | Detecting defects on a wafer using template image matching | Xing Chu, Jan Lauber | 2016-04-12 |
| 8817250 | Air bearing for substrate inspection device | Paul Doyle, Guoheng Zhao, Alexander Belyaev, Christian Wolters, Howard Dando +1 more | 2014-08-26 |