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Position sensor for a fast steering mirror |
Siegfried Fleischer, Glenn Scott Gibb, Jr., Yu-Chun Chang |
2016-09-20 |
| 9166684 |
Integrated commercial communications network using radio frequency and free space optical data communication |
Chandrasekhar Pusarla, Srinivas Sivaprakasam, Joseph Shiran, Malcolm J. Northcott, J. Elon Graves +2 more |
2015-10-20 |
| 8942562 |
Integrated commercial communications network using radio frequency and free space optical data communication |
Chandrasekhar Pusarla, Srinivas Sivaprakasam, Joseph Shiran, Malcolm J. Northcott, J. Elon Graves +2 more |
2015-01-27 |
| 8817250 |
Air bearing for substrate inspection device |
Paul Doyle, Guoheng Zhao, Alexander Belyaev, J. Rex Runyon, Christian Wolters +1 more |
2014-08-26 |
| 7607647 |
Stabilizing a substrate using a vacuum preload air bearing chuck |
Guoheng Zhao, Alexander Belyaev, Christian Wolters, Paul Doyle, Mehdi Vaez-Iravani |
2009-10-27 |